|
Electronic Materials Letters , vol. 4, no. 3, pp.131-133, September, 2008
DOI :
Effect of Nanoscaled SiO2 Coating on Luminescent Properties of Blue Phosphors
Hyug Jong Kim, Young Kyu Jeong, Hee Gyu Kim, and Byung Ho Choi*
Kumoh National Institute of Technology
Abstract : An investigation is reported on the growth of SiO2 nano-film on BaMgAl10O17:Eu+ blue phosphors using atomic layer deposition. Silicon oxide films were prepared at room temperature using Si(OC2H5)4, C2H5N and H2O as precursor, catalyst and reactant gas, respectively. XPS analysis showed the surface composition of coated phosphor powder was silicon oxide. In TEM and FESEM analysis, the growth rate was about 0.66 Å/cycle and the surface morphology became smoother than that of uncoated powder. The photoluminescence intensity for coated phosphors was 0.6~11.3% higher than that of uncoated.
Keyword :
atomic layer deposition, BaMgAl10O17:Eu+ phosphor, silicon oxide coating, photoluminescence, C2H5N catalysts
|
