Electronic Materials Letters , vol. 4, no. 3, pp.99-102, September, 2008

DOI :

Comparative Study of Annealing Effects on the Structural Properties of TiN and TiAlN Coatings

Myung Ho Kong¹, Hyoun Woo Kim^1,*, and Hack Hui Yang^2
1Inha University, ²Inha Technical College

Abstract : In a comparative study of the influence of thermal annealing processes on TiN and TiAlN coatings prepared by DC magnetron sputtering, we characterized the samples by using x-ray diffraction and scanning electron microscopy. The annealing temperature significantly affected the structural properties of the coatings. The TiO₂ phase was generated in the TiAlN coatings by thermal annealing at a higher temperature than in the TiN coatings.

Keyword : TiN, TiAlN, annealing, coatings